Characterizing the initial state of cantilever sensors

Xu, Meng (2008) Characterizing the initial state of cantilever sensors. Masters thesis, Memorial University of Newfoundland.

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Cantilevers are ultra-sensitive sensors capable of detecting a variety of physical and chemical phenomena. Due to the construction of the sensor, the cantilevers are often pre-bent prior to using them as actual sensors. In order to properly interpret further cantilever deflections due to sensing events, it is important to understand the initial states of the cantilever. Also it is imperative to establish the initial orientation of the cantilever chip with respect to the horizontal. In this work, a new model to measure the initial orientation of the chip has been developed using the standard optical beam deflection system. Using reference chips inclined at 2°, 3.5°, and 5°, the proposed method was shown to be successful. A new method was also developed to measure the initial curvature based entirely on the vertical motion of the incident laser. Results compared to optical images showed our method to be successful. Lastly, based on our ability to measure the angle of inclination of the chip, we have successfully modified the “Rotating Method” developed previously in our group.

Item Type: Thesis (Masters)
Item ID: 9081
Additional Information: Includes bibliographical references (leaves 36-37)
Department(s): Science, Faculty of > Physics and Physical Oceanography
Date: 2008
Date Type: Submission
Library of Congress Subject Heading: Curvature; Detectors--Design and construction; Flexure; Microelectromechanical systems

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