Hajijafari, Mohammad (2022) Electron-scattering-aware mixed-signal IC placement with reinforcement learning for EBL technologies. Masters thesis, Memorial University of Newfoundland.
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| Item Type: | Thesis (Masters) |
|---|---|
| URI: | http://research.library.mun.ca/id/eprint/15743 |
| Item ID: | 15743 |
| Additional Information: | Includes bibliographical references (pages 92-99) Restricted until 20240530 |
| Keywords: | mixed-signal IC placement, electron beam lithography, fogging effect, proximity effect, reinforcement learning |
| Department(s): | Engineering and Applied Science, Faculty of |
| Date: | May 2022 |
| Date Type: | Submission |
| Library of Congress Subject Heading: | Lithography, Electron beam; Reinforcement learning |
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