Electron-scattering-aware mixed-signal IC placement with reinforcement learning for EBL technologies

Hajijafari, Mohammad (2022) Electron-scattering-aware mixed-signal IC placement with reinforcement learning for EBL technologies. Masters thesis, Memorial University of Newfoundland.

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Item Type: Thesis (Masters)
URI: http://research.library.mun.ca/id/eprint/15743
Item ID: 15743
Additional Information: Includes bibliographical references (pages 92-99) Restricted until 20240530
Keywords: mixed-signal IC placement, electron beam lithography, fogging effect, proximity effect, reinforcement learning
Department(s): Engineering and Applied Science, Faculty of
Date: May 2022
Date Type: Submission
Library of Congress Subject Heading: Lithography, Electron beam; Reinforcement learning

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