Hajijafari, Mohammad (2022) Electron-scattering-aware mixed-signal IC placement with reinforcement learning for EBL technologies. Masters thesis, Memorial University of Newfoundland.
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Item Type: | Thesis (Masters) |
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URI: | http://research.library.mun.ca/id/eprint/15743 |
Item ID: | 15743 |
Additional Information: | Includes bibliographical references (pages 92-99) Restricted until 20240530 |
Keywords: | mixed-signal IC placement, electron beam lithography, fogging effect, proximity effect, reinforcement learning |
Department(s): | Engineering and Applied Science, Faculty of |
Date: | May 2022 |
Date Type: | Submission |
Library of Congress Subject Heading: | Lithography, Electron beam; Reinforcement learning |
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